Event Calendar

Start Date: 9/26/2023 9:00 AM EDT
End Date: 9/26/2023 10:00 AM EDT

Location:

Organization Name: iNEMI

Contact:

Tuesday, September 26, 2023
9:00-10:00 a.m. EDT (US)
3:00-4:00 p.m. CEST (Europe)
10:00-11:00 p.m. JST (Japan)
Register now
 

Abstract

Guest speaker Yaw S. Obeng, PhD, from the Advanced Electronics Group, Physical Measurement Laboratory of the National Institute of Standards and Technology (NIST), will talk about NIST’s current research focus on developing non-destructive metrology for monitoring reliability issues in 3D integrated electronic systems.  Working closely with the semiconductor industry, his group has been looking at various performance limiting phenomena in 3D interconnects.
 
The talk will identify common reliability concerns and metrology gaps for 3D integrated systems. We will introduce as suite of microwave-based broadband dielectric spectroscopic (BDS) techniques and show how these non-destructive metrologies can serve as early warning monitors for reliability issues. These techniques are based on the application of high frequency microwaves, to probe impedance changes due to material and structural changes in integrated circuits under various external stress.  We will also discuss the combination of BDS with scanning probe infrastructure to create the scanning microwave microscopy (SMM) technique, which has been used detect buried artifacts and characterize metallic contacts.

About the Speaker

Yaw Obeng, PhD 
National Institute of Standards and Technology (NIST)

Dr. Obeng currently serves as a research chemist in the Advanced Electronics Group of the Physical Measurement Laboratory for the National Institute of Standards and Technology (NIST). His current research interests include developing new measurements techniques, tools, physical models, and data analysis techniques to enable reliability assessments in emerging nanoelectronic devices. Dr. Obeng previously worked with AT&T Bell Laboratories, Lucent Technologies, Agere Systems and Texas Instruments. He also co-founded two start-up companies (psiloQuest, Inc and Nkanea Technologies, Inc.) dedicated to the development of new materials for semiconductor technology fabrication. He holds more than 50 U.S. and international patents, and has published over 200 papers in various technical publications. Dr. Obeng holds a PhD in Chemistry and an MBA degree, and has over 30 years of proven technical leadership in corporate, entrepreneurial and academic environments. He is a Fellow of the Royal Society of Chemistry (UK), Fellow of the American institute of Chemists, and Senior Member of IEEE.
 

Registration

This webinar is open to industry (iNEMI membership is not required). Advance registration is required.

Tuesday, September 26, 2023
9:00-10:00 a.m. EDT (US)
3:00-4:00 p.m. CEST (Europe)
10:00-11:00 p.m. JST (Japan)
Register now