MEMS Test Methods for Inertial Sensors



Project Leaders

Chair: Ken Foust, Intel

Co-chair: Michael Gaitan, NIST

End-of-Project Webinar

MEMS devices are susceptible to a new set of failure mechanisms, in addition to traditional semiconductor mechanisms. An industry consensus baseline for reliability expectations would aid in qualification planning, and improve consistency, efficiency, and effectiveness of reliability testing for MEMS devices.

As such, this project focused on determining what standard testing protocols were in place in the accelerometer industry.  We focused on identification of commonalities in the test methods used by device manufacturers to report device performance in their datasheets.  Our results are intended to be the starting discussion point on developing standard testing protocols for the datasheets.  The end-of-project report will review the results of our survey and what next steps are needed.

  • End-of-Project Presentation:  Survey of Practices Used for Accelerometer Performance Parameters in Datasheets (September 15, 2015)
  • Recording of end-of-project webinar
  • This webinar was for iNEMI members and non-members
  • Presenter:  Michael Gaitan (NIST)

Project Statement and Statement of Work


The goal of this project is to conduct a survey of current practices for determining performance metrics of MEMS sensors in order to discover what method should be proposed as a standard.
The team plans to conduct a survey for accelerometers and, specifically, the performance metrics for accelerometers specified in the MEMS Industry Group's (MIG's) Standardized Sensor Performance Parameter Definitions (SSPPD). Device manufacturers will be asked to identify which method(s) they use to measure each of the peformance parameters defined in the SSPPD. The desired outcome is to identify a candidate for a test method for each of the performance parameters. 
If work proceeds to a second phase, Phase II would conduct any further discussions that may be required to determine their viability for adoption as standards and to perform any necessary technical analysis.  Results and recommendations would be submitted to the IEEE Standards Committee for the standards development process.
If this approach works well, the project could then move on to another family of sensors.

For Additional Information

Mark Schaffer